| Maker/Model |
Tools name | Qty | vintage |
| TEMD-1000 |
Evaporator | 1 | |
| AG Associate Rapid Annealing 8108 |
DIFF | 3 | 1996.7 |
| KOYO LINDBERG850 |
RTA | 2 | |
| SVG 7000 plus |
LPCVD poly furnace | 2 | |
| TEL A8 |
LPCVD poly furnace | 38 | 1992-1993 |
| Fusion M200AC |
Asher | 4 | |
| GASONIC 3010 |
Asher | 2 | |
| HITACHI 308 |
Metal-etch | 12 | |
| LAM 4420 |
poly-etch | 8 | |
| LAM 4428 |
poly-etch | 4 | |
| P5000 |
Oxide-etch | 17 | |
| P5000 Mark11-2 |
poly-etch | 5 | |
| P5000 Mark11-3 |
poly-etch | 9 | |
| P5000 Mark11-4 |
poly-etch | 3 | |
| P5000 Mark11 |
CVD | 7 | |
| RAMCO 8500 |
Asher | 4 | |
| Eaton NV20 |
High Current implant | 2 | |
| Genus 1510 |
High energy implant | 2 | |
| Varian 1000 |
Ion implant | 1 | |
| Varian 1500 |
High Current implant | 1 | |
| Varian E1000 |
Ion implant | 1 | 1997.11 |
| Varian M2000 |
Metal-Sputter | 3 | |
| Varian 180XP |
High Current implant | 1 | |
| KLA 2132 |
defect scan | 2 | 1997.10 |
| 2600 OPTIPROBE |
Thin film Measurement System | 4 | 1997.1/2000.1 |
| HITACHI S-6280 |
CD-SEM | 2 | 1998.1 |
| HORIZON 4085X |
Prober | 2 | |
| KEITHLEY 590 CV analyzer |
CV tester | 1 | 2006.9 |
| KLA 6200 |
KLA-Tencor Defect | 2 | 1995.1 |
| KLA FT-750 |
Thin film Measurement System | 2 | 1996.4 |
| KLA TENCOR 5100 |
overlay tool | 2 | |
| Nikon |
Microscpoe | 2 | |
| PROMETRIX NC 110 |
| 2 | 1995.3 |
| Rough Auto EL III-24A |
Ellispometer | 2 | |
| RS-35C |
Rs tester | 1 | |
| SEMITEST SCA-2500 |
| 2 | |
| Tencor Surfascan 7700 |
Patterned wafer Inspection system | 2 | 1995.11 |
| Nikon |
I-line Stepper | 1 | 1993.6 |
| Nikon NSR-2005i9C |
I-line Stepper | 9 | 1993/1994 |
| SVG 90S |
SVG Coater&Developer Track | 17 | 1994-2000 |
| Anelva ILC-1015 |
Metal-Sputter | 1 | |
| ASM ADVANCE 600 |
| 4 | |
| WJ1000 |
CVD | 10 | 1996-1997 |
| Mactronics LB2850P5 |
Wafer Transfer | 4 | |
| DNS 821 |
Wet-clean | 3 | |
| DNS WS-820C |
Wet-clean | 12 | 1994-1998 |
| FSI excaliber |
Wet-clean | 8 | 1994 |
| Semitool |
Wet-clean | 1 | 2003.1 |
| TOHO KASEI |
Wet-clean | 37 | 1996.1 |
| ALCATEL5400 |
| 1 | |
